Fabio Fachin paper featured in Journal of Micromechanics and Microengineering Higlights of 2011

May 24, 2011

Analytical extraction of residual stresses and gradients in MEMS structures with application to CMOS-layered materials
F Fachin, S A Nikles, J Dugundji and B L Wardle
2011 J. Micromech. Microeng. 21 095017
doi: 10.1088/0960-1317/21/9/095017